2 edition of Evaluation of a CMOS/SOS process using process validation wafers found in the catalog.
Evaluation of a CMOS/SOS process using process validation wafers
J. S. Suehle
1982 by U.S. Dept. of Commerce, National Bureau of Standards, National Technical Information Service, distributor in Washington, DC, [Springfield, VA .
Written in English
|Other titles||Evaluation of a C.M.O.S./S.O.S. process using process validation wafers|
|Statement||J.S. Suehle, L.W. Linholm, and G.M. Marshall ; prepared for Defense Nuclear Agency|
|Series||NBSIR -- 82-2514|
|Contributions||Linholm, Loren W, Marshall, Glen Murray, 1953-, United States. Defense Nuclear Agency, United States. National Bureau of Standards|
|The Physical Object|
|Pagination||iv, 42 p. :|
|Number of Pages||42|
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