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Friday, May 1, 2020 | History

2 edition of Evaluation of a CMOS/SOS process using process validation wafers found in the catalog.

Evaluation of a CMOS/SOS process using process validation wafers

J. S. Suehle

Evaluation of a CMOS/SOS process using process validation wafers

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Published by U.S. Dept. of Commerce, National Bureau of Standards, National Technical Information Service, distributor in Washington, DC, [Springfield, VA .
Written in English

    Subjects:
  • Integrated circuits,
  • Semiconductor wafers,
  • Process control

  • Edition Notes

    Other titlesEvaluation of a C.M.O.S./S.O.S. process using process validation wafers
    StatementJ.S. Suehle, L.W. Linholm, and G.M. Marshall ; prepared for Defense Nuclear Agency
    SeriesNBSIR -- 82-2514
    ContributionsLinholm, Loren W, Marshall, Glen Murray, 1953-, United States. Defense Nuclear Agency, United States. National Bureau of Standards
    The Physical Object
    Paginationiv, 42 p. :
    Number of Pages42
    ID Numbers
    Open LibraryOL14848350M


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Evaluation of a CMOS/SOS process using process validation wafers by J. S. Suehle Download PDF EPUB FB2

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